九州大学大学院 工学研究院 機械工学部門 熱流体物理研究室 Thermofluid Physics Laboratory
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Laser Micro Processing

Objective: To develop simplified laser micro processing technology

Conventional Technologies
Focusing a laser light to a very small diameter spot
Shallow focal depth --> requires precise alignment

Our study
Application of bessel beams that have a deep focal depth
Precise alignment is unnecessary

簡易なレーザー微細加工の開発

Challenges: Understanding of the processing characteristics of Bessel Beams

Polyimide
Silicone Ceramics 
装置イメージ
 ドリル加工 溝加工 
Drilling Grooving